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Instrumentation, Measurement, and Optical Sensing|50 Article(s)
Simultaneously detecting transversal and longitudinal displacement with the dielectric metasurface
Zhiyu Zhang, Chenghui Kuang, Haofeng Zang, Yonghua Lu, and Pei Wang
The compact, sensitive, and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging. The metasurface offers a promising solution to develop high-precision displacement metrology. In this work, we proposed and experimentally demonstrated a two-dimensional displacement (XZ) measurement device by a dielectric metasurface. Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence. We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12 µm along the z-axis can be resolved with a 900 µm × 900 µm metasurface. Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor. The compact, sensitive, and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging. The metasurface offers a promising solution to develop high-precision displacement metrology. In this work, we proposed and experimentally demonstrated a two-dimensional displacement (XZ) measurement device by a dielectric metasurface. Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence. We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12 µm along the z-axis can be resolved with a 900 µm × 900 µm metasurface. Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor.
Chinese Optics Letters
- Publication Date: Feb. 20, 2024
- Vol. 22, Issue 2, 021202 (2024)
Towards a fast and stable tachypnea monitor: a C60-Lys enabled optical fiber sensor for humidity tracking in breath progress
Fuxiang Wang, Feng Gao, Xiaoniu Wang, Ying Wang, Fei Jin, Ziqiao Ren, Jun Wu, Zhenlin Huang, Wenjun Zhou, and Changyu Shen
The pandemic of respiratory diseases enlightened people that monitoring respiration has promising prospects in averting many fatalities by tracking the development of diseases. However, the response speed of current optical fiber sensors is still insufficient to meet the requirements of high-frequency respiratory detection during respiratory failure. Here, a scheme for a fast and stable tachypnea monitor is proposed utilizing a water-soluble C60-Lys ion compound as functional material for the tracking of humidity change in the progression of breath. The polarization of C60-Lys can be tuned by the ambient relative humidity change, and an apparent refractive index alteration can be detected due to the small size effect. In our experiments, C60-Lys is conformally and uniformly deposited on the surface of a tilted fiber Bragg grating (TFBG) to fabricate an ultra-fast-response, high-sensitivity, and long-term stable optical fiber humidity sensor. A relative humidity (RH) detecting sensitivity of 0.080 dB/% RH and the equilibrium response time and recovery time of 1.85 s and 1.58 s are observed, respectively. Also, a linear relation is detected between the resonance intensity of the TFBG and the environment RH. In a practical breath monitoring experiment, the instantaneous response time and recovery time are measured as 40 ms and 41 ms, respectively, during a 1.5 Hz fast breath process. Furthermore, an excellent time stability and high repeatability are exhibited in experiments conducted over a range of 7 days. The pandemic of respiratory diseases enlightened people that monitoring respiration has promising prospects in averting many fatalities by tracking the development of diseases. However, the response speed of current optical fiber sensors is still insufficient to meet the requirements of high-frequency respiratory detection during respiratory failure. Here, a scheme for a fast and stable tachypnea monitor is proposed utilizing a water-soluble C60-Lys ion compound as functional material for the tracking of humidity change in the progression of breath. The polarization of C60-Lys can be tuned by the ambient relative humidity change, and an apparent refractive index alteration can be detected due to the small size effect. In our experiments, C60-Lys is conformally and uniformly deposited on the surface of a tilted fiber Bragg grating (TFBG) to fabricate an ultra-fast-response, high-sensitivity, and long-term stable optical fiber humidity sensor. A relative humidity (RH) detecting sensitivity of 0.080 dB/% RH and the equilibrium response time and recovery time of 1.85 s and 1.58 s are observed, respectively. Also, a linear relation is detected between the resonance intensity of the TFBG and the environment RH. In a practical breath monitoring experiment, the instantaneous response time and recovery time are measured as 40 ms and 41 ms, respectively, during a 1.5 Hz fast breath process. Furthermore, an excellent time stability and high repeatability are exhibited in experiments conducted over a range of 7 days.
Chinese Optics Letters
- Publication Date: Feb. 23, 2024
- Vol. 22, Issue 2, 021201 (2024)
High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer
Ziqi Yin, Fangfei Li, Yunke Sun, Yun Zou, Yan Wang, Hongxing Yang, Pengcheng Hu, Haijin Fu, and Jiubin Tan
We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths. Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He–Ne laser and four acoustic optical frequency shifters. Further, to improve phase synchronization measurement for multiwavelengths, we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals. Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths, and standard deviation is 1.7 × 10-5 m in a range of 2 m. We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths. Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He–Ne laser and four acoustic optical frequency shifters. Further, to improve phase synchronization measurement for multiwavelengths, we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals. Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths, and standard deviation is 1.7 × 10-5 m in a range of 2 m.
Chinese Optics Letters
- Publication Date: Jan. 08, 2024
- Vol. 22, Issue 1, 011204 (2024)
Welding depth measurement for different mode lasers using optical coherence tomography
Guanming Xie, Sanhong Wang, Yueqiang Zhang, You Li, Biao Hu, Yu Fu, and Qifeng Yu
Optical coherence tomography (OCT) allows a direct and precise measurement of laser welding depth by coaxially measuring the keyhole depth and can be used for process monitoring and control. When OCT measurement was taken during single-beam laser welding, the keyhole instability of aluminum welding resulted in highly scattered OCT data and complicated the welding depth extraction methods. As a combination of an inner core beam and an outer ring beam, a novel adjustable ring mode (ARM) laser for producing a stable keyhole was applied to the OCT measurement. Different ARM laser power arrangements were conducted on aluminum and copper. The results indicated that the ring beam greatly improved the stability of the core beam-induced keyhole, and smooth welding depth can be extracted from the concentrated OCT data. Optical coherence tomography (OCT) allows a direct and precise measurement of laser welding depth by coaxially measuring the keyhole depth and can be used for process monitoring and control. When OCT measurement was taken during single-beam laser welding, the keyhole instability of aluminum welding resulted in highly scattered OCT data and complicated the welding depth extraction methods. As a combination of an inner core beam and an outer ring beam, a novel adjustable ring mode (ARM) laser for producing a stable keyhole was applied to the OCT measurement. Different ARM laser power arrangements were conducted on aluminum and copper. The results indicated that the ring beam greatly improved the stability of the core beam-induced keyhole, and smooth welding depth can be extracted from the concentrated OCT data.
Chinese Optics Letters
- Publication Date: Jan. 18, 2024
- Vol. 22, Issue 1, 011203 (2024)
New speckle pattern interferometry for precise in situ deformation measurements
Ruyue Zhang, Yu Fu, and Hong Miao
A new electronic speckle pattern interferometry method is proposed to realize in situ deformation measurements. The feature of the method is the combination of a high-speed camera and multiple laser Doppler vibrometers (LDVs) for synchronous measurements. The high-speed camera is used to record and select effective interferograms, while the LDVs are used to measure the rigid body displacement caused by vibrations. A series of effective interferograms with known shifted phase values are obtained to calculate the deformation phase. The experimental results show that the method performs well in measuring static and dynamic deformations with high accuracy in vibrating environments. A new electronic speckle pattern interferometry method is proposed to realize in situ deformation measurements. The feature of the method is the combination of a high-speed camera and multiple laser Doppler vibrometers (LDVs) for synchronous measurements. The high-speed camera is used to record and select effective interferograms, while the LDVs are used to measure the rigid body displacement caused by vibrations. A series of effective interferograms with known shifted phase values are obtained to calculate the deformation phase. The experimental results show that the method performs well in measuring static and dynamic deformations with high accuracy in vibrating environments.
Chinese Optics Letters
- Publication Date: Jan. 08, 2024
- Vol. 22, Issue 1, 011202 (2024)
Simultaneous transmission of time-frequency and data with co-amplification over urban fiber links
Qian Cao, Zhou Tong, Lei Liu, Jialiang Wang, Kang Ying, Fufei Pang, and Youzhen Gui
We demonstrate a simultaneous transmission of time-frequency and data over a 160-km urban business network in Shanghai. The signals are transmitted through a cascaded optical link consisting of 48 km and 32 km, which are connected by an optical relay. The metrological signals are inserted into the communication network using dense wavelength division multiplexing. The influence of the interference between different signals has been discussed. The experimental results demonstrate that the radio frequency (RF) instability can reach 2.1×10-14 at 1 s and 2.3×10-17 at 10,000 s, and the time interval transfer of one pulse per second (1 PPS) signal with less than 10 ps at 1 s is obtained. This work paves the way for the widespread dissemination of ultra-stable time and frequency signals over the communication networks. We demonstrate a simultaneous transmission of time-frequency and data over a 160-km urban business network in Shanghai. The signals are transmitted through a cascaded optical link consisting of 48 km and 32 km, which are connected by an optical relay. The metrological signals are inserted into the communication network using dense wavelength division multiplexing. The influence of the interference between different signals has been discussed. The experimental results demonstrate that the radio frequency (RF) instability can reach 2.1×10-14 at 1 s and 2.3×10-17 at 10,000 s, and the time interval transfer of one pulse per second (1 PPS) signal with less than 10 ps at 1 s is obtained. This work paves the way for the widespread dissemination of ultra-stable time and frequency signals over the communication networks.
Chinese Optics Letters
- Publication Date: Dec. 29, 2023
- Vol. 22, Issue 1, 011201 (2024)
Improving accuracy and sensitivity of diffraction-based overlay metrology
Wenhe Yang, Nan Lin, Xin Wei, Yunyi Chen, Sikun Li, Yuxin Leng, and Jianda Shao
Overlay (OVL) for patterns placed at two different layers during microchip production is a key parameter that controls the manufacturing process. The tolerance of OVL metrology for the latest microchip needs to be at nanometer scale. This paper discusses the influence on the accuracy and sensitivity of diffraction-based overlay (DBO) after developing inspection and after etching inspection by the asymmetrical deformation of the OVL mark induced by chemical mechanical polishing or etching. We show that the accuracy and sensitivity of DBO metrology can be significantly improved by matching the measuring light wavelength to the thickness between layers and by collecting high-order diffraction signals, promising a solution for future OVL metrology equipment. Overlay (OVL) for patterns placed at two different layers during microchip production is a key parameter that controls the manufacturing process. The tolerance of OVL metrology for the latest microchip needs to be at nanometer scale. This paper discusses the influence on the accuracy and sensitivity of diffraction-based overlay (DBO) after developing inspection and after etching inspection by the asymmetrical deformation of the OVL mark induced by chemical mechanical polishing or etching. We show that the accuracy and sensitivity of DBO metrology can be significantly improved by matching the measuring light wavelength to the thickness between layers and by collecting high-order diffraction signals, promising a solution for future OVL metrology equipment.
Chinese Optics Letters
- Publication Date: Jul. 21, 2023
- Vol. 21, Issue 7, 071204 (2023)
Two-photon polymerization of femtosecond high-order Bessel beams with aberration correction|Editors' Pick
Erse Jia, Chen Xie, Na Xiao, Francois Courvoisier, and Minglie Hu
In the femtosecond two-photon polymerization (2PP) experimental system, optical aberrations degrade the fabrication quality. To solve this issue, a multichannel interferometric wavefront sensing technique is adopted in the adaptive laser processing system with a single phase-only spatial light modulator. 2PP fabrications using corrected high-order Bessel beams with the above solution have been conducted, and high-quality microstructure arrays of microtubes with 20 µm diameter have been rapidly manufactured. The effectiveness of the proposed scheme is demonstrated by comparing the beam intensity distributions and 2PP results before and after aberration corrections. In the femtosecond two-photon polymerization (2PP) experimental system, optical aberrations degrade the fabrication quality. To solve this issue, a multichannel interferometric wavefront sensing technique is adopted in the adaptive laser processing system with a single phase-only spatial light modulator. 2PP fabrications using corrected high-order Bessel beams with the above solution have been conducted, and high-quality microstructure arrays of microtubes with 20 µm diameter have been rapidly manufactured. The effectiveness of the proposed scheme is demonstrated by comparing the beam intensity distributions and 2PP results before and after aberration corrections.
Chinese Optics Letters
- Publication Date: Jul. 20, 2023
- Vol. 21, Issue 7, 071203 (2023)
Detecting the vector of nanoscale light field with atomic defect|On the Cover
Qiyu Wang, Zehao Wang, Xiangdong Chen, and Fangwen Sun
Modulation of a vector light field has played an important role in the research of nanophotonics. However, it is still a great challenge to accurately measure the three-dimensional vector distribution at nanoscale. Here, based on the interaction between the light field and atomic-sized nitrogen-vacancy (NV) color center in diamonds, we demonstrate an efficient method for vectorial mapping of the light-field distribution at nanoscale. Single NV centers with different but well-defined symmetry axes are selected and then interact with the same tightly focused light field. The excitation of a single NV center is related to the angle between the NV center axis and the polarization of the light field. Then the fluorescence patterns of different NV centers provide the information on the vectorial light field distribution. Subsequently analyzing the fluorescence patterns with the help of a deep neural network, the intensity and phase of the light-field vectorial components are fully reconstructed with nanometer resolution. The experimental results are in agreement with theoretical calculations. It demonstrates that our method can help to study light–matter interaction at nanoscale and extend the application of vector light fields in research on nanophotonics. Modulation of a vector light field has played an important role in the research of nanophotonics. However, it is still a great challenge to accurately measure the three-dimensional vector distribution at nanoscale. Here, based on the interaction between the light field and atomic-sized nitrogen-vacancy (NV) color center in diamonds, we demonstrate an efficient method for vectorial mapping of the light-field distribution at nanoscale. Single NV centers with different but well-defined symmetry axes are selected and then interact with the same tightly focused light field. The excitation of a single NV center is related to the angle between the NV center axis and the polarization of the light field. Then the fluorescence patterns of different NV centers provide the information on the vectorial light field distribution. Subsequently analyzing the fluorescence patterns with the help of a deep neural network, the intensity and phase of the light-field vectorial components are fully reconstructed with nanometer resolution. The experimental results are in agreement with theoretical calculations. It demonstrates that our method can help to study light–matter interaction at nanoscale and extend the application of vector light fields in research on nanophotonics.
Chinese Optics Letters
- Publication Date: Jul. 11, 2023
- Vol. 21, Issue 7, 071202 (2023)
Intrapulse coherence degradation suppressing method of echo signal in coherent lidar
Haisheng Cong, Jianfeng Sun, Zhiyong Lu, Hongyu He, Weijie Ren, Yuxin Jiang, Lingling Xu, Chaoyang Li, Longkun Zhang, and Zhengwei Zhang
Aiming at coherence degradation during target detection, a suppressing method based on frequency-modulated continuous wave coherent lidar is proposed. Combined with a random iteration algorithm, a long-pulse echo signal with coherent degradation is matched with random phase noise of a certain frequency and achieves coherence restoration. Simulation and field experiment results show that this proposed method can recover the intrapulse coherence in long-pulse echo signals. In addition, for the real target echo signal at 4.2 and 19.8 km, the peak signal-to-noise ratio processed by this method is increased by 0.35 times and 4 times after pulse compression, respectively. Aiming at coherence degradation during target detection, a suppressing method based on frequency-modulated continuous wave coherent lidar is proposed. Combined with a random iteration algorithm, a long-pulse echo signal with coherent degradation is matched with random phase noise of a certain frequency and achieves coherence restoration. Simulation and field experiment results show that this proposed method can recover the intrapulse coherence in long-pulse echo signals. In addition, for the real target echo signal at 4.2 and 19.8 km, the peak signal-to-noise ratio processed by this method is increased by 0.35 times and 4 times after pulse compression, respectively.
Chinese Optics Letters
- Publication Date: Jul. 25, 2023
- Vol. 21, Issue 7, 071201 (2023)
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